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SCI-E Article

A data-driven approach to selection of critical process steps in the semiconductor manufacturing pro
성명 이동희()
소속 산업융합학부 산업융합학부
캠퍼스
우수선정주 2019년 10월 4째주
Author 이동희 (Div Interdisciplinary Ind Studies) corresponding author; Yang, Jin-Kyung (Div Interdisciplinary Ind Studies); Lee, Cho-Heui (Div Interdisciplinary Ind Studies);
Corresponding Author Info Lee, DH (reprint author), Hanyang Univ, Room 503-2,Engn Bldg 2,222 Wangsimni Ro, Seoul 133791, South Korea.
E-mail 이메일 아이콘dh@hanyang.ac.kr
Document Type Article
Source JOURNAL OF MANUFACTURING SYSTEMS Volume:52 Issue: Pages:146-156 Published:2019
Times Cited 0
External Information http://dx.doi.org/10.1016/j.jmsy.2019.07.001
Abstract Semiconductor wafers are fabricated through sequential process steps. Some process steps have a strong relationship with wafer yield, and these are called critical process steps. Because wafer yield is a key performance index in wafer fabrication, the critical process steps should be carefully selected and managed. This paper proposes a systematic and data-driven approach for identifying the critical process steps. The proposed method considers troublesome properties of the data from the process steps such as imbalanced data, missing values, and random sampling. As a case study, we analyzed hypothetical operational data and confirmed that the proposed method works well.
Web of Science Categories Engineering, Industrial; Engineering, Manufacturing; Operations Research & Management Science
Funding National Research Foundation of KoreaNational Research Foundation of Korea [2016K2A9A2A11938390]; Hanyang University [HY-2018]
Language English
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